Back in 1978, I was admitted to Northwestern Polytechnical University.

Chapter 263 The Lithography Machine at Tsinghua University
Tsinghua University, Department of Precision Instruments Building, first floor.

The entire first floor has been transformed into a precision optical instrument processing factory, known internally as the 9003 Experimental Base. It was here that Tsinghua University's lithography machine was born.

On the third day of the Lunar New Year, it was time to go back to work, and the building was bustling with people.

A thin, middle-aged man walked into the office of the 9003 Experimental Base. He was about to change his clothes and enter through the powerful air duct to start his day's work when he was stopped by someone.

"Old Xu!"

Professor Xu turned his head and looked at the person who called him, Shen Zhao, the department head and also the factory manager of this processing plant.

"Old Xu, let's go to the conference room for a meeting."

"it is good."

The atmosphere in the meeting room... is a little different. Everyone should be all smiles after returning from the New Year holiday, right? Why do they all look so gloomy?
"Everyone's here, let's start the meeting," Director Shen began. "Yesterday, I visited the relevant departments to offer New Year's greetings. The leaders of the electronics industry system said that our lithography machine project's R&D funding might..."

Professor Xu's heart skipped a beat: "What will happen?"

"It will be greatly reduced. After all... our country needs to focus on economic development, and many projects require patience. Our lithography machines... so far, we've only sold two units, which is simply not enough to support the huge R&D expenses, so..."

Professor Xu stood up abruptly: "That's right, the country is focused on economic development, but our lithography machines also serve the country's economic development. If we can manufacture top-notch chips, it means we can make huge profits and even earn foreign exchange through exports!"

"Yes, that makes sense, but right now..." Director Shen said helplessly, "Right now, no one is buying our lithography machines, and the huge R&D funding can't be converted into productivity, so..."

"Hmph, many domestic companies want to buy from abroad, even though foreign equipment is clearly not as advanced as ours!" Professor Xu said angrily, "After 78..."

This is infuriating!

In 1960, Professor Xu graduated from Tsinghua University and stayed on to teach. Then, during that special period, he was sent down to Poyang Lake to grow rice on a farm there.

One night in 1971, the farm manager knocked on his door in the middle of the night. He thought he was doomed, but it turned out to be an urgent telegram from the capital, asking him to return to the capital for an important mission.

Professor Xu abandoned his rice seedlings and came to the capital, only to learn that the country needed to develop a key piece of equipment for semiconductor production: a lithography machine.

At that time, he was just a teaching assistant when he participated in such an important project. From then on, he began his history of building lithography machines. He never forgot the excitement he felt when he accepted the task. Our country's semiconductor industry is pinned on us!
Tsinghua University mobilized a research and development team of hundreds of people from five departments to begin arduous research and development. Starting with the development of helium-neon gas lasers needed for lithography machines, they designed and manufactured all the equipment themselves, including precision guide rails, lead screws, ball bearings, stepper motors, control computers, optical systems, and large-aperture projection lenses.

And so, the first projection lithography machine in the East was finally born!

When lithography machines were first invented, they were all contact lithography machines, where the mask was directly applied to the silicon wafer. It wasn't until the 1970s that Perkin-Elmer in the United States successfully developed a 1:1 projection lithography machine.

Photoresist is applied to a silicon wafer, and then a light source is used to etch away the photoresist that needs to be removed.

The earliest method used a mercury lamp as the light source. The scanning stage dragged the silicon wafer and moved synchronously with the mask. The light source was transformed into uniform light through the slit, projecting the pattern onto the photoresist.

This device alone increased the chip yield rate from 10% to 70%.

However, because it needs to be moved, it is relatively large and has a complex structure. So, the American company GCA later started to develop step-by-step repetitive projection lithography machine, in which the mask and silicon wafer do not need to move synchronously, and the objective lens can also be reduced in magnification, which greatly reduces the difficulty of mask production.

After this invention, the specific technical route of lithography machines was fixed. Afterwards, the light source was continuously improved and the technology was refined, but the basic structure remained unchanged. Except for the EUV lithography machines required for 3-nanometer chips in later generations, all others have the same result.

After Professor Xu and his team began their research, they set their sights on projection lithography machines. A few years ago, such lithography machines were successfully developed. Next, they should continue their efforts and develop step-by-step projection lithography machines!

Unfortunately, times have changed!
Products that were once important are now available for purchase!

The turning point came in 1978 when the East sent a lithography machine to the Paris Industrial Exhibition. After the exhibition, the West realized that the East could produce such a lithography machine, so there was no need for any export ban.

Our lithography machine showcased the technological prowess of the East at the Paris Industrial Exhibition. After returning, all the companies that had initially expressed interest in buying the lithography machine changed their minds!

Aside from Factory 109 purchasing one for trial use, there's only the one at Base 9003.

Now, they want to continue developing a step-by-step projection lithography machine, but the higher authorities have hesitated and are unwilling to provide funding!

If I had known, I wouldn't have gone to the exhibition back in '78! But... it was an order from above, and we could only obey. In fact, none of the people who went abroad at that time were researchers of lithography machines. They were questioned and embarrassed at the conference, and were even questioned about their authenticity, with the demand that the Easterners take the lithography machine with them.

Seeing that they were about to lose face, they quickly sent a telegram, asking Professor Xu to rush over. After a thorough explanation, he answered all their questions, which finally convinced the foreigners that the East possessed this technology!
Professor Xu felt waves of anger whenever he recalled that period of history.

Now, those people are actually trying to cut off their budget!
The inability to sell them isn't our fault! Even though the lithography machines that can be bought from abroad aren't as powerful as ours, many domestic electronics factories still buy from overseas. They're just looking for an opportunity to go abroad and see the world for themselves…

Thinking of this, Professor Xu clenched his fist.

"Old Xu, sit down. The purpose of our meeting today is to discuss this. Even if the higher-ups don't support it, Tsinghua University will raise funds on its own to conduct research and development. However, due to insufficient funds, it may be slower."

"According to our plan, with sufficient funding, it will be ready in another year. This will narrow the gap between us and foreign lithography machines to zero! If we lose the R&D funding now, it might take three to five years... Director Shen, we've finally caught up, we can't afford to delay any longer!"

In the chip industry, Moore's Law is a curse! It forces researchers to work day and night to continuously develop advanced technologies.

Falling behind at one step leads to falling behind at every step. The lithography machine companies in the United States, which are now at their peak, have gradually declined because they could not compete with the lithography machine industry of the island nation. And the lithography machine industry of the island nation was ended by ASML.

In later generations, everyone knows that the East's chip industry is lagging behind, but they don't know that in the 1970s and 80s, the East's chip industry was not that far behind. If investment had been increased, and the chip industry had been treated as a major industry like the island nation and South Korea, it could definitely have developed!
After all, we Easterners are the most intelligent people in the world!
such a pity!
With this thought in mind, Qin Liang walked to the door of the conference room, took a deep breath, and then pushed the door open.

"Everyone, with Northwestern Polytechnical University here, our chip industry will not lag behind!"

Everyone was stunned. Who is this? They don't recognize him!

However, everyone recognized the person behind the young man.

"Mr. Lin, what's wrong...?"

"Well, I was just passing by and came in to take a look. I heard you guys say that our self-developed lithography machine from Tsinghua University has been ignored by a bunch of blind fools. We won't sit idly by. Liangzi, tell us what you think."

Qin Liang nodded: "Professor Xu, could you give me a brief introduction to the performance of our current lithography machine?"

"Well, the lithography machine we're currently developing can process chips ranging from 4 to 6 inches. It has a stage travel of 160mm x 160mm, a theoretical resolution of 0.8 micrometers, and an actual effective resolution of 1.25 micrometers..."

"This performance is great, we need two!" Two!

Lithography machines are all handmade. Even ASML, a lithography machine giant in later generations, could only produce a few dozen EUV lithography machines a year. For the Department of Precision Instruments at Tsinghua University, these two lithography machines would be enough to keep them handmade for several months.

“Great, we'll only quote cost price…”

Qin Liang shook his head: "No, we won't take advantage of Tsinghua University. We'll pay whatever the international market price is."

Everyone was excited.

"Thank you, thank you so much!" Professor Xu stood up abruptly and grasped Qin Liang's hand: "With your funding, we can now develop a step-by-step projection lithography machine!"

Qin Liang smiled and said, "We want this first step-by-step projection lithography machine too! We'll pay you in full. Hurry up... can you develop it for us by the end of the year?"

The semiconductor industry in the East has caught up; we absolutely cannot afford to delay! With this funding from Northwestern Polytechnical University, we can reach the same level as the world!

This weakness in the chip industry is about to be addressed!
“Okay!” Professor Xu nodded: “I won’t go home this year, I’ll stay in 9003 every day… Everyone, would you like to go and take a look now?”

"Okay."

Today's meeting was to discuss how to continue developing lithography machines despite reduced funding. Now, there's no need to worry! The funding from Northwestern Polytechnical University is enough for them to complete the development of the new lithography machine!
The step-projection lithography machine, which was originally expected to be developed in 85, was developed in 81, keeping pace with the world!

The group headed towards the laboratory, put on protective suits, passed through the dustproof passage, and entered the 9003 experimental base.

The lithography machine that participated in the Paris Industrial Exhibition is placed in the center of the laboratory. The temperature here is maintained at 20 degrees Celsius all year round, with a margin of error of no more than 0.1 degrees Celsius. The dustproof standard is Class 100, and the number of floating dust particles in 1 cubic meter of air is controlled to less than 100 particles. Even the vibration amplitude here cannot exceed 2 micrometers!

Actually, if you think about it, you'll know that if you're carving a 1.25-micrometer silicon wafer, and the lithography machine vibrates up and down even by 2 micrometers, the carved product will definitely be a waste!
This requirement alone is enough to demonstrate how high-end it is.

Qin Liang looked at the machine with a complicated expression.

"Next, the step-by-step projection lithography machine must not be shown to the public. After all, we can't afford to make the same mistake twice. If any superior wants to show off the machine, then... notify Elder Lin."

The 78 exhibition taught them a lesson, but those ambitious leaders never learned their lesson. After Tsinghua University successfully developed the step-by-step projection lithography machine, the higher-ups wanted to hold another Capital Industrial Exhibition and exhibit the lithography machine again.

Foreigners circled around it, observing it from top to bottom and asking all sorts of questions. At that time, Professor Xu and his team once again answered all their questions without reservation. As a result, those people learned all the Eastern technology. Nikon's rise to prominence was closely related to this industrial exhibition!
Old Lin was taken aback at first, then realized: "That's right, this machine is meant to serve our army. The technology inside is all military secret. Anyone who dares to suggest exhibiting it will be in for a world of trouble!"

"If it's not shown..."

Qin Liang smiled and said, "Good wine needs no bush. As long as our technology is advanced, we won't have to worry about not being able to sell our products. Simply put, Intel's chips are still using a 3-micron process. The next process node is 1.5 microns. The chips we mass-produce this year will use a 1.5-micron process. Once the chips are on the market, let's see if those spineless guys still want to buy foreign equipment."

"Of course, they might also think that we can buy all the equipment produced by Tsinghua University. We are not afraid of large scale. We can not only produce the chips needed domestically, but also do OEM manufacturing for foreign countries! This step-by-step projection lithography machine can further improve the yield rate. Those domestic factories that are complacent and blindly worship foreign things will be completely outdated and eliminated, and they will all go bankrupt!"

Professor Xu was deeply moved. This young man knew the current situation in China and made the right choice by strongly supporting Tsinghua University's lithography machine, thereby reshaping the entire semiconductor industry in the East!

Those guys who fawn over foreign things are truly despicable!

"Of course, I also hope that the Department of Precision Instruments at Tsinghua University can continue its efforts to develop new lithography machines and always remain at the world's leading level. I believe that foreign customers will come to purchase them. At that time, we should also be selective in our sales. The most advanced ones should be delivered to the domestic market first, and the outdated ones can be sold abroad."

“That’s right!” Professor Xu’s voice trembled. “Hmph, in the future, we will also set up technological barriers for the Westerners!”

"Qin Liang, I have a suggestion," Director Shen said. "How about we, Tsinghua University, Northwestern Polytechnical University, and the military, join forces to establish a specialized company?"

Old Lin shook his head: "We are the military, we can't be tainted by money. Don't worry, we will provide plenty of support. As for jointly establishing a company, you can decide that."

In the 1980s, the country needed to develop its economy, and the military needed to be patient. With military spending decreasing, the military was allowed to engage in business in 1985. However, soon a series of major problems arose, and by 1998, it was completely stopped.

Lin Lao's attitude was firm: the army must never be tainted by money!

Director Shen looked at Qin Liang: "Qin Liang, what do you think?"

Qin Liang nodded: "Of course, no problem! In this way, we will have complete control over our company's products, and the higher-ups will not be able to interfere with us with any administrative orders. Tsinghua University will mainly contribute technology, holding 48% of the shares, while Northwestern Polytechnical University will contribute capital, also holding 48% of the shares. Our company needs a place to operate, and we will ask the military to coordinate this for us. We will rent military barracks, and we will have to pay them some compensation. The remaining 4% will be the military's shares."

After Qin Liang finished speaking, he looked at Elder Lin and said, "We can't just occupy the army's land for nothing, can we?"

Old Lin's expression was complicated: "This is not something I can decide; it requires an application and report."

The army is indeed poor, but it shouldn't expect charity from others just because it's poor. However, renting barracks is actually quite reasonable.

Moreover, Elder Lin could understand Qin Liang's meaning.

The technology ultimately belongs to Tsinghua University, so it wouldn't be appropriate to give them too few shares. Northwestern Polytechnical University contributed the money, so their share shouldn't be reduced either. Equal shares for both sides would be the most equitable arrangement. But then, who would be in charge?

At this point, the military's 4% stake can come in handy. Regardless of whose side they are on, whoever takes the lead will have a stake of over 50%. In the event of a dispute in the future, the military will be a crucial factor in determining the balance of power.

Therefore, he did not refuse immediately, but went back to ask for instructions, since it was also for the development of the army.

"Yes, I also need to go back to Northwestern Polytechnical University to report, but the development of this lithography machine cannot be delayed, and we will transfer the deposit as soon as possible."

"it is good!"

Director Shen was beaming with excitement: "Qin Liang, thank you so much for taking care of our worries!"

"If only Qin Liang had come to Tsinghua University back then!"

Hearing Professor Xu's lament, Qin Liang's face showed helplessness: "Sigh, I wanted to come back then too, but there were some problems with the political background check, and they didn't dare to accept me!"

"Yes."

"Even if the political vetting is cancelled, ideological education must not be relaxed. We must let college students of this new era know why we are studying, especially now that the country has opened up and we have seen the outside world. If going to college is just to go abroad and then stay and live abroad, then we are only producing ungrateful children."

Standing to the side, Old Lin had mixed feelings. What you said is true, but... your mother-in-law is in the business of studying and working abroad. Aren't you going against your mother-in-law by saying this?
　PS: This is a schematic diagram of a lithography machine. The bottom part shows step-by-step projection, which means exposing one image at a time. The bottom part shows the researchers at the time.

　　
　
(End of this chapter)